Aerosol samples were collected using Anderson cascade impact samplers and the dispersed single aerosol partiles were embedded in thin PVDF films. A group of single aerosol particles distributed in an area of 180 μm×150μm was analyzed by the scanning proton microprobe(SPM). The distributions of 12 elements in the group were mapped with the three dimensional contour technique. Air pollution sources were then analyzed in some details. It is shown that analysis of the group of single aerosol particles by SPM may become a new approach to the study of air pollution.