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A Study of lattice damage by MeV P ion implantation in Si
更新时间：2021-04-09

    • A Study of lattice damage by MeV P ion implantation in Si

    • NUCLEAR TECHNIQUES   Issue 9, (1995)
    • CLC： TN304.12

    • Published：01 September 1995

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  • A Study of lattice damage by MeV P ion implantation in Si[J]. Nuclear techniques, 1995, (9). DOI：

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