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四川联合大学原子核科学技术研究所
Published:01 October 1995
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[1]王培禄,刘仲阳,姜景云,杨兴富.离子束辅助沉积MoS_x膜的特性研究[J].核技术,1995(10):604-609.
Characteristics of Mosx films deposited by ion beam assistance[J]. Nuclear techniques, 1995, (10).
[1]王培禄,刘仲阳,姜景云,杨兴富.离子束辅助沉积MoS_x膜的特性研究[J].核技术,1995(10):604-609. DOI:
Characteristics of Mosx films deposited by ion beam assistance[J]. Nuclear techniques, 1995, (10). DOI:
从轰击离子种类、辅助沉积方式、不同衬底材料以及存放环境湿度等因素对离子束辅助沉积的MoSx膜特性的影响作了研究,发现这些因素在膜的沉积或使用过程中对其品质和特性都产生不能忽视的影响
For MoSx films deposited by ion beam assistance
the effect of bombarded ion species
deposition mode
substrate materials and humidity of of store environment etc on the properties of these films has been studied. Experimental results indicated that the effect of these factors on films can not be ignored both in.the film’s deposition and in uses.
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