Investigation of ion sputtering for eutectic Cu-37at%Ag alloys

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Investigation of ion sputtering for eutectic Cu-37at%Ag alloys

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- Investigation of ion sputtering for eutectic Cu-37at%Ag alloys
- NUCLEAR TECHNIQUES Issue 8, (1994)
- 作者机构：
  
  1. 中国科学院腐蚀科学开放研究实验室
  2. 中国科学院上海原子核研究所
  3. 杭州大学
  4. 中国科学院腐蚀科学开放研究实验室中国科学院上海原子核研究所杭州大学
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG146.11
- Published：01 August 1994
- 稿件说明：
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[1]王震遐,潘冀生,章骥平,陶振兰,朱福英,赵烈,张慧明.Cu－37at％　Ag共晶合金的离子溅射研究[J].核技术,1994(08):455-462.

Investigation of ion sputtering for eutectic Cu-37at%Ag alloys[J]. Nuclear techniques, 1994, (8).
[1]王震遐,潘冀生,章骥平,陶振兰,朱福英,赵烈,张慧明.Cu－37at％　Ag共晶合金的离子溅射研究[J].核技术,1994(08):455-462. DOI：

Investigation of ion sputtering for eutectic Cu-37at%Ag alloys[J]. Nuclear techniques, 1994, (8). DOI：

摘要

侧重研究了入射Ａｒ＋离子不同剂量轰击时表面微形貌和溅射原子角分布之间的关联，并建议用“元素按靶点表面微形貌特征局域富集模型”来解释溅射原子角分布形状以及择优溅射曲线的变化；发现其结果与实验相符合。

Abstract

Angular distributions of sputtered atoms and the phenamenon of element locally rich relative to microtopographic feature（ELR-MTF） of sputtered target surface have been investigated for Cu-37 at%Ag alloys by means of RBS

SEM and EPMA measurements.In this paper

emphasis will be put on the correlation between surface topography caused by Ar+ ion bombardment with different doses and angular distribution of sputtered atoms ejecting from various micro-zones at topographical surface during sputtering.The experiment result was explained with the so-called ELR-MTF model which can qualitatively interpret the shape of the angular distributions and the variation of the preferential sputtering curves.

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