Study of the N+B ion implanted layer of GCr15 bearing steel by XRD, AES and XPS

Yang Dehua Zhang Xushou Xue Qunji

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Study of the N+B ion implanted layer of GCr15 bearing steel by XRD, AES and XPS

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- Study of the N+B ion implanted layer of GCr15 bearing steel by XRD, AES and XPS
- NUCLEAR TECHNIQUES Issue 1, (1993)
- 作者机构：
  
  1. 中国科学院兰州化学物理研究所固体润滑开放研究实验室
  2. 中国科学院兰州化学物理研究所固体润滑开放研究实验室,兰州,730000
- 作者简介：
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- DOI：
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- Published：01 January 1993
- 稿件说明：
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[1]杨德华,张绪寿,薛群基.GCr15轴承钢N+B离子注入层的XRD、AES和XPS研究[J].核技术,1993(01):52-56.

Yang Dehua Zhang Xushou Xue Qunji. Study of the N+B ion implanted layer of GCr15 bearing steel by XRD, AES and XPS[J]. Nuclear techniques, 1993, (1): 52-56.
[1]杨德华,张绪寿,薛群基.GCr15轴承钢N+B离子注入层的XRD、AES和XPS研究[J].核技术,1993(01):52-56. DOI：

Yang Dehua Zhang Xushou Xue Qunji. Study of the N+B ion implanted layer of GCr15 bearing steel by XRD, AES and XPS[J]. Nuclear techniques, 1993, (1): 52-56. DOI：

摘要

用X-射线衍射（XRD）、俄歇电子能谱（AES）和X-光电子能谱（XPS）的方法对N+B离子注入层的相组成、元素的分布和元素的结合状态进行了综合考察。结果表明:注入层是由基体中原有的α-Fe、Fe

C相和注入过程中新生成的六方BN相和ε-Fe

N-Fe

N相组成的。另外

在注入层表面还有一层石墨型结构的碳膜存在。

Abstract

A comprehensive study has been performed on the phase compositions

element distributions and binding states of the N + B ion implanted layer by means of X- ray diffraction（XRD）

Auger electron spectroscopy（AES） and X- ray photoelectron spectroscopy（XPS）. It was shown that the ion implanted layer was composed of a - Fe

Fe3C

both being original phases of the substrate

and hexagonal BN and ε- Fe2N- Fe3N phases formed during the N + B ion implantation process. On the surface of the implanted layer there was a layer of carbon film with a graphite- like structure.

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