Incident angle dependence of angular distributions in the sputtering of Cu by 100 keV Ar<sup>+</sup> and Ne<sup>+</sup>

Li Daiqing

您当前的位置：

首页 >

文章列表页 >

Incident angle dependence of angular distributions in the sputtering of Cu by 100 keV Ar⁺ and Ne⁺

更新时间：2021-04-09

- Incident angle dependence of angular distributions in the sputtering of Cu by 100 keV Ar⁺ and Ne⁺
- NUCLEAR TECHNIQUES Issue 8, (1992)
- 作者机构：
  
  1. 烟台师范学院
  2. 中国科学院物理研究所
  3. 南开大学,烟台,264000
  4. ,天津,300071
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：01 August 1992
- 稿件说明：
移动端阅览
[1]李岱青,刘家瑞,徐天冰,张德龙.100keV Ar~+、Ne~+轰击铜靶所产生的溅射原子角分布与离子入射角的关系[J].核技术,1992(08):457-460.

Li Daiqing. Incident angle dependence of angular distributions in the sputtering of Cu by 100 keV Ar⁺ and Ne⁺[J]. Nuclear techniques, 1992, (8): 457-460.
[1]李岱青,刘家瑞,徐天冰,张德龙.100keV Ar~+、Ne~+轰击铜靶所产生的溅射原子角分布与离子入射角的关系[J].核技术,1992(08):457-460. DOI：

Li Daiqing. Incident angle dependence of angular distributions in the sputtering of Cu by 100 keV Ar⁺ and Ne⁺[J]. Nuclear techniques, 1992, (8): 457-460. DOI：

摘要

在40°和70°斜入射条件下

用100keV Ar

、Ne

轰击铜靶

所产生的溅射原子角分布的溅射优先方向分别位于表面法线的两侧

溅射原子角分布对于表面法线明显不对称;而Ne

所对应的溅射优先方向都位于表面法线方向

且溅射原子角分布对于表面法线是对称的。用级联碰撞理论分析了所得到的实验结果

并比较了Ar

和Ne

溅射机制上的不同。

Abstract

The relations between angular distributions of sputtered atoms from a copper target and incident angles of 100 keV Ne+ and Ar+ have been investigated. The experimental results show that at incident angles of 40°and 70°

the preferential sputtering directions for the incidence of 100 keV Ar+ are on two sides of the surface normal respectively and the angular distributions are not symmetric about the surface normal; while for the incidence of 100 keV Ne+

the preferential sputtering directions are in the direction of surface normal and the angular distributions are symmetric about it. The experimental results are analyzed by using the cascade collision theory and the difference between Ar+ and Ne+ sputtering mechanisms is discussed.

关键词

Keywords

references

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Angular distribution and total cross section measurements of ¹⁰B（n,α）⁷Li reaction

Effect of dopant boron on sputtering yields of nickel and copper

Development of a multi-sample high intensity sputter negative ion source for AMS

Shielding of neutrons for the medium energy heavy ion interaction

Simulation investigation on properties of energy spectrum of sputtered particles

Related Author

张松柏

张国辉

陈金象

施兆民

袁竞

陈泽民

陈迎堂

Gledenov Yu M

Related Institution

Institute of Heavy Ion Physics, School of Physics, Peking University, Key Laboratory of Heavy Ion Physics, Ministry of Education, Beijing, 100871)YUAN Jing CHEN Zemin CHEN Yingtang

清华大学物理系

Joint Institute for Nuclear Research

Dubna

Russia 重离子物理教育部重点实验室

AI问答

Address：2019 Jialuo Road, Jiading, Shanghai, China Postal code：201800
Tel：021-39194977 Email：LHB@sinap.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 沪ICP备05005479号-1 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.
Total Visits：880771 Visits Today：298

⁰

Incident angle dependence of angular distributions in the sputtering of Cu by 100 keV Ar+ and Ne+

DOI：

摘要

Abstract

关键词

Keywords

references

Incident angle dependence of angular distributions in the sputtering of Cu by 100 keV Ar⁺ and Ne⁺