In this paper

we focus on constitution

magnetism modification and characterization of GaN-based materials using ion beam technology and formation of the nano structure by implanting Mn+ or Co+ ion of different doses into the film samples.SQUID and AGM were used to measure the magnetic properties

such as coercivity and saturation magnetization

for the samples before and after annealing

M-H and M-T curves showed ferromagnetism in the films at both low temperature and room temperature.RBS/C

PIXE and XRD were used to analyze the microstructure

content of doping transition metal and damage.The nano-cluster of ferromagnetism particle was observed under HRTEM.