Al-Cr-Si oxide coatings were prepared on 316L stainless steel by double glow plasma surface alloying technique in order to promote the capability against tritium permeation. Microstructures and compositions of the coatings were studied by scanning electron microscope

transmission electron microscope and X-ray diffraction. Adhesion strength of the oxide coatings was tested by scratch adhesion test and thermal shock test. The results showed that dense and continuous Al2O3 films were formed on the substrate owing to the addition of elements Cr and Si. Besides

the spinel-type composite metal oxide Fe(AlCr)2O4 was formed of Al2O3 and iron/chromic oxide in the outer layer. The coatings prepared at oxygen flow rate of 10 standard cubic centimeter per minute exhibited the best microstructure and mechanical properties with a bonding force of 68 N. No cracks were found in the coatings after thermal shock testing.