Fabrication techniques of X-ray spiral zone plates

GAO Nan ZHU Xiaoli Li Hailiang Xie Changqing

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Fabrication techniques of X-ray spiral zone plates

更新时间：2021-03-05

- Fabrication techniques of X-ray spiral zone plates
- NUCLEAR TECHNIQUES Vol. 33, Issue 10, (2010)
- 作者机构：
  
  中国科学院微电子研究所
- 作者简介：
- 基金信息：
  
  国家重点基础研究发展计划(973)项目(2007CB935302)资助
- DOI：
  CLC： TN205
- Published：01 October 2010
- 稿件说明：
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[1]高南,朱效立,李海亮,谢常青.X射线螺旋波带片制备技术[J].核技术,2010,33(10):730-733.

GAO Nan ZHU Xiaoli Li Hailiang Xie Changqing. Fabrication techniques of X-ray spiral zone plates[J]. Nuclear techniques, 2010, 33(10): 730-733.
[1]高南,朱效立,李海亮,谢常青.X射线螺旋波带片制备技术[J].核技术,2010,33(10):730-733. DOI：

GAO Nan ZHU Xiaoli Li Hailiang Xie Changqing. Fabrication techniques of X-ray spiral zone plates[J]. Nuclear techniques, 2010, 33(10): 730-733. DOI：

摘要

本文将电子束曝光和X射线曝光技术相结合以制造X射线波段螺旋波带片。用电子束曝光和微电镀技术在镂空薄膜上制备母波带片X射线掩模版

用X射线曝光和微电镀技术小批量复制螺旋波带片。研制成可用于1.24nm波长的螺旋波带片

其最外环宽度为200nm

金吸收体厚度为700nm

占空比合理

侧壁陡直

结构优良。

Abstract

The techniques to make X-ray spiral zone plates using electron beam and X-ray lithography were studied. A master mask was fabricated on polyimide membrane by E-beam lithography and micro-electroplating. Spiral zone plates were efficiently replicated by X-ray lithography and micro-electroplating. By combining the techniques

spiral zone plates at 1 keV were successfully fabricate. With an outermost zone width of the 200 nm

and the gold absorbers thickness of 700 nm

the high quality zone plates can be used for X-ray phase contrast microscopy.

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Related Institution

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Division of Physical Biology, CAS Key Laboratory of Interfacial Physics and Technology, Shanghai Institute of Applied Physics, Chinese Academy of Sciences

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