The development of all-permanent magnet ECR ion sources at IMP

SUN Liangting1 ZHAO Hongwei1 ZHANG Xuezhen1 LI Jinyu1 WANG Hui1 MA Baohua1 GUO Xiaohong1 SHANG Yong1 LI Xixia1 SHA Shan1 XIE Dan2 1

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The development of all-permanent magnet ECR ion sources at IMP

更新时间：2021-03-12

- The development of all-permanent magnet ECR ion sources at IMP
- NUCLEAR TECHNIQUES Vol. 32, Issue 3, (2009)
- 作者机构：
  
  1. 中国科学院近代物理研究所
  2. Berkeley Ion Equipment Inc
- 作者简介：
- 基金信息：
  
  国家杰出青年科学基金(10225523);国家自然科学基金(10405026)资助
- DOI：
  CLC： TL503.3
- Published：01 March 2009
- 稿件说明：
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[1]孙良亭,赵红卫,张雪珍,李锦钰,王辉,马宝华,郭晓虹,尚勇,李锡霞,沙杉,谢祖祺.全永磁ECR离子源研究进展[J].核技术,2009,32(03):173-177.

SUN Liangting1 ZHAO Hongwei1 ZHANG Xuezhen1 LI Jinyu1 WANG Hui1 MA Baohua1 GUO Xiaohong1 SHANG Yong1 LI Xixia1 SHA Shan1 XIE Dan2 1. The development of all-permanent magnet ECR ion sources at IMP[J]. Nuclear techniques, 2009, 32(3): 173-177.
[1]孙良亭,赵红卫,张雪珍,李锦钰,王辉,马宝华,郭晓虹,尚勇,李锡霞,沙杉,谢祖祺.全永磁ECR离子源研究进展[J].核技术,2009,32(03):173-177. DOI：

SUN Liangting1 ZHAO Hongwei1 ZHANG Xuezhen1 LI Jinyu1 WANG Hui1 MA Baohua1 GUO Xiaohong1 SHANG Yong1 LI Xixia1 SHA Shan1 XIE Dan2 1. The development of all-permanent magnet ECR ion sources at IMP[J]. Nuclear techniques, 2009, 32(3): 173-177. DOI：

摘要

ECR（电子回旋共振）离子源是产生稳定的强流多电荷态离子束流最有效装置。全永磁ECR离子源因其独特的特点为很多中小型多电荷态离子束流实验平台与离子注入机等系统所采用

为后者产生重复性好、稳定性强的多电荷态离子束流。本文着重论述了中国科学院近代物理研究所研制的几台全永磁多电荷态ECR离子源及其特性与典型性能

如能产生强流高电荷态离子束流的高性能全永磁离子源LAPECR2

能产生强流中低电荷态离子束流的LAPECR1

能产生多电荷态重金属离子束流的LAPECR1-M等。这些性能稳定的离子源为提高近代物理研究所相关试验平台的性能提供了关键的束流品质保障。

Abstract

Electron Cyclotron Resonance (ECR) ion source is regarded as the most efficient machine to produce stable multiple charge state ion beams. Because of the special characteristics

all-permanent magnet ECR ion sources have been widely adopted around the world to produce stable ion beams of multiple charge state with good repetition and high duty factor for compact research platforms and ion beam implanters. In this paper

all-permanent magnet ECR ion sources developed at IMP are presented

and typical parameters and performances are discussed. The high charge state source

LAPECR2

is mainly used to produce intense high charge state ion beams

and the LAPECR1 source is designed to produce intense ion beams of medium and low charge state. An improved LAPECR1-M is specially designed to produce heavy metal ion beams of low charge state. These ECR ion sources have been adopted by different experimental terminals at IMP and

with their nice performance

many experimental studies could be possible.

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