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Y ion beam dynamic enhanced deposition of TiN film
更新时间：2021-03-12
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    • Y ion beam dynamic enhanced deposition of TiN film

    • NUCLEAR TECHNIQUES   Issue 1, (2002)
    • CLC： TG174.4

    • Published：01 January 2002

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  • ZHANG Tao HOU Junda. Y ion beam dynamic enhanced deposition of TiN film[J]. Nuclear techniques, 2002, (1): 25-28. DOI：

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