Study of fabrication of antielectron modulator by LIGA

HUANG Junrong    1; 2    PENG Liangqiang  1  YI Futing  1  YU Runsheng  1    WEI Long  1  JIANG Yijian  2  ZHANG Jufang  1  HAN Yong  1  1

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Study of fabrication of antielectron modulator by LIGA

更新时间：2021-03-12

- Study of fabrication of antielectron modulator by LIGA
- NUCLEAR TECHNIQUES Issue 10, (2002)
- 作者机构：
  
  1. 中国科学院高能物理研究所
  2. 北京工业大学国家产学研激光技术中心
  3. 中国科学院高能物理研究所北京100039北京工业大学国家产学研激光技术中心北京,100022
  4. ,北京,100039
- 作者简介：
- 基金信息：
  
  中国科学院高能物理研究所知识创新工程 (U - 5 16 - 5 );北京市自然科学基金 (2 0 0 2 0 0 5 )资助
- DOI：
  CLC： TN305.7
- Published：01 October 2002
- 稿件说明：
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[1]黄军容,彭良强,伊福廷,于润升,魏龙,蒋毅坚,张菊芳,韩勇.LIGA技术制备正电子慢化体的实验研究[J].核技术,2002(10):893-896.

HUANG Junrong 1, 2 PENG Liangqiang 1 YI Futing 1 YU Runsheng 1 WEI Long 1 JIANG Yijian 2 ZHANG Jufang 1 HAN Yong 1 1. Study of fabrication of antielectron modulator by LIGA[J]. Nuclear techniques, 2002, (10): 893-896.
[1]黄军容,彭良强,伊福廷,于润升,魏龙,蒋毅坚,张菊芳,韩勇.LIGA技术制备正电子慢化体的实验研究[J].核技术,2002(10):893-896. DOI：

HUANG Junrong 1, 2 PENG Liangqiang 1 YI Futing 1 YU Runsheng 1 WEI Long 1 JIANG Yijian 2 ZHANG Jufang 1 HAN Yong 1 1. Study of fabrication of antielectron modulator by LIGA[J]. Nuclear techniques, 2002, (10): 893-896. DOI：

摘要

LIGA技术具有加工精度高、深宽比大、表面平整、应用领域广等优点

是一种先进的微细加工方法。实验中将LIGA技术的优点用于正电子慢化体的制作中

能获得传统加工方法无法制作出的薄壁网状多孔镍结构

满足新型正电子慢化体的制备要求。本文报道了用LIGA技术制作正电子慢化体的实验研究

Abstract

High aspect ratio and great structural height

the most outstanding excellences of LIGA process

are used to fabricate reticulate nikel structure with abundant holes as antielectron modulator. The study of fabrication of antielectron modulator by LIGA was reported in this paper.

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