The IAD technology (Ion assisted deposition) attractes more attention recently because of the advantages. The Hall accelerator for IAD was developed. It has small size (  6cm)

low energy (average energy 40-150eV)

high beam current (200-1000mA)

large uniformity (the uniform area >  50cm) and the compact construction. The design of the Hall accelerator and the optimum magnetic structure were presented. The permanent magnet was applied. The pole pieces were arranged to obtain the divergent magnetism and strong magnetism gradient along axial direction. The design gives us good results. The high discharge efficiency and low neutral loss were obtained. The Hall acceralater can work in low pressure 1×10 -2 -2×10 -2 Pa

low flowrates 5-10 SCCM stably.