For Lindhard scaling interaction potential scattering commonly used in sputtering theory

we analyzed the great difference between Sigmund’s single power and the double power cross sections calculated in this article. The double power cross sections can give a much better approximation to the Born-Mayer scattering in the low energy region (m~0.1). In particular

to solve the transport equations by K r-C potential interaction given by Urbassek few years ago

only the double power cross sections (m~0.1) can yield better approximate results for the number of recoils. Therefore

the Sigmund’s single power cross section might be replaced by the double power cross sections in low energy collision cascade theory.