Carbon nanofiber-tipped-cones with controllable apex angle were fabricated by sputtering graphite with 1.2keV Ar

+

ions in different incident angles at room temperature.The density of carbon cones was estimated at 1×10

9

—1×10

10

/cm

2

.The cones with carbon nanofiber were oriented to the ion-beam direction.By increasing the incidence from 30°to 60°

the apex angle of cones decreased from 33°to 20°

and the aspect ratio increased from 250nm/150nm to 1200nm/400nm.The decreased apex angle

and the increased aspect ratio and density of the cones

were attributed to decreasing effective diffuse coefficient induced by the ion beam and increasing sputtering yield.By increasing the current density from 200μA/cm

2

to 800μA/cm

2

the apex angle of cones decreased from 90°to 20°and the height of cones increased from 100nm to 1200nm.The increased dose rate caused by larger current densities of the ion beam should result in the different number of the sputtered atom or cluster

which was considered as reason of the decrement of the apex angle and the increment of the height of cones.