GAO Yang 1, 2 LI Mei 2 PENG Liangqiang 3 ZHANG Jufang 3 HUANG Junrong 3 1. Two engineering applications of LIGA technology[J]. Nuclear techniques, 2002, (10): 883-888.
GAO Yang 1, 2 LI Mei 2 PENG Liangqiang 3 ZHANG Jufang 3 HUANG Junrong 3 1. Two engineering applications of LIGA technology[J]. Nuclear techniques, 2002, (10): 883-888.DOI:
Based on the viewpoints of engineering applications of LIGA technology
essential design and fabrication challenges of Micro/Milli- safety combination lock mechanisms and Micro/Milli- acceleration switch are briefly presented. Demands and requirements of those two devices’ LIGA fabrication process are also outlined in the paper.