Titanium-containing diamond-like carbon films were deposited on silicon substrate by filtered cathodic vacuum arc (FCVA) technology

Effects of C2H2 flow rate and duct current on the composition and structures of the titanium-containing diamond like carbon films were studied. The results showed that the titanium-containing diamond like carbon films were composed of TiC and diamond like carbon structure. The C2H2 flow rate and duct current affected significantly on the composition and structures of the films. The Ti content in the films decreased

but the C content increased

with increasing C2H2 flow rate and duct current.