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Property of multilayer TiCN films formed by ion-beam-assisted-deposition
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    • Property of multilayer TiCN films formed by ion-beam-assisted-deposition

    • NUCLEAR TECHNIQUES   Issue 12, (2007)
    • CLC： TG174.4

    • Published：01 December 2007

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  • JIN Jie XU Zhiqian WANG Jinhui MING Jianchuan GUO Qiqian LI Liuhe. Property of multilayer TiCN films formed by ion-beam-assisted-deposition[J]. Nuclear techniques, 2007, (12): 1019-1022. DOI：

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