Development of a commercial facility of plasma immersion ion implantation and deposition

WANG Langping WANG Xiaofeng TANG Baoyin

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Development of a commercial facility of plasma immersion ion implantation and deposition

更新时间：2021-03-12

- Development of a commercial facility of plasma immersion ion implantation and deposition
- NUCLEAR TECHNIQUES Issue 12, (2007)
- 作者机构：
  
  1. 哈尔滨工业大学现代焊接生产技术国家重点实验室
  2. 哈尔滨工业大学现代焊接生产技术国家重点实验室,哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG174.444
- Published：01 December 2007
- 稿件说明：
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[1]王浪平,王小峰,汤宝寅.全方位离子注入与沉积技术及其工业机的研制[J].核技术,2007(12):983-986.

WANG Langping WANG Xiaofeng TANG Baoyin. Development of a commercial facility of plasma immersion ion implantation and deposition[J]. Nuclear techniques, 2007, (12): 983-986.
[1]王浪平,王小峰,汤宝寅.全方位离子注入与沉积技术及其工业机的研制[J].核技术,2007(12):983-986. DOI：

WANG Langping WANG Xiaofeng TANG Baoyin. Development of a commercial facility of plasma immersion ion implantation and deposition[J]. Nuclear techniques, 2007, (12): 983-986. DOI：

摘要

全方位离子注入与沉积（Plasma immersion ion implantation and deposition

PIIID）技术发展到现在

已经逐步走向工业化应用。本文介绍了全方位离子注入与沉积技术的原理

探讨了全方位离子注入与沉积工业机应该具备的功能

介绍了研制成功的全方位离子注入与沉积设备的结构和实施效果

其脉冲阴极弧等离子体源沉积速率达到2.9（?）/s

IGBT固体开关调制器输出电压达到10 kV

能够一次处理多个工业零件。

Abstract

Plasma immersion ion implantation and deposition (PIIID) has been developed rapidly in recent years

and commercial applications of the technique have been realized. A PIIID facility for commercial applications was developed in our lab. In this paper

the principle and functions of the commercial PIIID facility is discussed. Deposition rate of the pulsed cathodic arc plasma source in the PIIID facility is up to 2.9 (?)/s

and output voltage of the IGBT modulator is 10 kV. Industrial components in batches can be treated with the PIIID facility.

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Plasma immersion ion implantation and deposition hybrid process on aluminum and titanium alloy

Related Author

WANG Langping WANG Yuhang WANG Xiaofeng TANG Baoyin DONG Shen

王宇航

王小峰

汤宝寅

董申

Related Institution

School of Mechatronics engineering, Harbin Institute of Technology

哈尔滨工业大学机电工程学院哈尔滨 150001 哈尔滨工业大学现代焊接生产技术国家重点实验室

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