Studies on coating technology of inner wall of stainless steel pipe with TiN film and its vacuum characteristics

ZHANG Yaofeng WANG Yong WEI Wei WANG Jianping FAN Le JIANG Daoman

doi:null

您当前的位置：

首页 >

文章列表页 >

Studies on coating technology of inner wall of stainless steel pipe with TiN film and its vacuum characteristics

更新时间：2021-03-12

- Studies on coating technology of inner wall of stainless steel pipe with TiN film and its vacuum characteristics
- NUCLEAR TECHNIQUES Issue 3, (2006)
- 作者机构：
  
  1. 中国科学技术大学国家同步辐射实验室
  2. 中国科学技术大学国家同步辐射实验室,合肥,230029
- 作者简介：
- 基金信息：
  
  国家自然科学基金(10245002)资助项目
- DOI：
  CLC： TG174.44
- Published：01 March 2006
- 稿件说明：
移动端阅览
[1]张耀锋,王勇,尉伟,王建平,范乐,蒋道满.不锈钢管道内壁镀TiN薄膜技术及其真空性能的研究[J].核技术,2006(03):161-164.

ZHANG Yaofeng WANG Yong WEI Wei WANG Jianping FAN Le JIANG Daoman. Studies on coating technology of inner wall of stainless steel pipe with TiN film and its vacuum characteristics[J]. Nuclear techniques, 2006, (3): 161-164.
[1]张耀锋,王勇,尉伟,王建平,范乐,蒋道满.不锈钢管道内壁镀TiN薄膜技术及其真空性能的研究[J].核技术,2006(03):161-164. DOI：

ZHANG Yaofeng WANG Yong WEI Wei WANG Jianping FAN Le JIANG Daoman. Studies on coating technology of inner wall of stainless steel pipe with TiN film and its vacuum characteristics[J]. Nuclear techniques, 2006, (3): 161-164. DOI：

摘要

介绍了对不锈钢管道大面积内壁用直流溅射方法镀TiN薄膜的技术及工艺

并分析了薄膜的相关参数

测试了镀膜管道的真空性能。结果表明

该方法能够快速、高效地在管道内壁镀上高质量的TiN薄膜

且镀膜后真空室表面的放气率明显低于原不锈钢材料的放气率。

Abstract

The coating technology of inner wall of stainless steel pipe with TiN film by DC sputtering is presented in detail in this paper. The corresponding parameters of the coating process are described and the vacuum characteristics of the coated pipe are determined. Very low outgassing rate shows that DC sputtering can be used to coat stainless steel pipe with TiN film rapidly and effectively

and that the coating technique is a new and effective way for surface treatments of vacuum chambers of some accelerators.

关键词

Keywords

references

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：2019 Jialuo Road, Jiading, Shanghai, China Postal code：201800
Tel：021-39194977 Email：LHB@sinap.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 沪ICP备05005479号-1 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.
Total Visits：881139 Visits Today：666

⁰