RFQ accelerators for ion implantation

FANG Jiaxun YAN Xueqing GUO Zhiyu LI Weiguo GUO Jufang YU Maolin LU Yuanrong GAO Shuli YU Jinxiang SONG Zhizhong REN Xiaotang CHEN Jiaer

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RFQ accelerators for ion implantation

更新时间：2021-03-12

- RFQ accelerators for ion implantation
- NUCLEAR TECHNIQUES Issue 2, (2006)
- 作者机构：
  
  1. 北京大学重离子物理研究所
  2. 北京大学重离子物理研究所,北京,100871
- 作者简介：
- 基金信息：
  
  国家自然科学基金重点项目(19335010,19975004)
- DOI：
  CLC： TL53
- Published：01 February 2006
- 稿件说明：
移动端阅览
[1]方家驯,颜学庆,郭之虞,李纬国,郭菊芳,于茂林,陆元荣,高淑丽,于金祥,宋执中,任晓堂,陈佳洱.应用于离子注入的RFQ加速器[J].核技术,2006(02):140-144.

FANG Jiaxun YAN Xueqing GUO Zhiyu LI Weiguo GUO Jufang YU Maolin LU Yuanrong GAO Shuli YU Jinxiang SONG Zhizhong REN Xiaotang CHEN Jiaer. RFQ accelerators for ion implantation[J]. Nuclear techniques, 2006, (2): 140-144.
[1]方家驯,颜学庆,郭之虞,李纬国,郭菊芳,于茂林,陆元荣,高淑丽,于金祥,宋执中,任晓堂,陈佳洱.应用于离子注入的RFQ加速器[J].核技术,2006(02):140-144. DOI：

FANG Jiaxun YAN Xueqing GUO Zhiyu LI Weiguo GUO Jufang YU Maolin LU Yuanrong GAO Shuli YU Jinxiang SONG Zhizhong REN Xiaotang CHEN Jiaer. RFQ accelerators for ion implantation[J]. Nuclear techniques, 2006, (2): 140-144. DOI：

摘要

射频四极场（Radio frequency quodrupole

RFQ）加速器是一种非常适于用作MeV级能量离子注入的加速器。它具有束流强、体积小、使用方便、离子源处在地电位

还可同时加速正、负两种离子等优点。本文介绍了RFQ加速器在国际上的发展状况及其基本原理、北京大学研制的1 MeV RFQ加速器的具体结构、性能以及一种新型RFQ-SFRFQ组合加速器的特点。

Abstract

RFQ accelerators are very suitable for the ion implantation at the energy level of MeV. They have the advantages such as strong beam current

small size

convenient use

ion source at ground potential and simultaneous acceleration of both positive and negative ions. In the paper

the development

situation and the principle of RFQ accelerators

the structure and performance of 1.0 MeV RFQ accelerator at Peking University and a new type of RFQ-SFRFQ combined accelerator are introduced.

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