Experimental study of nano-composite superhard TiN/Si<sub>3</sub><sub>4</sub> films prepared by ion beam assisted deposition

ZHANG Ping CAI Zhihai DUYuehe TAN Jun

doi:null

您当前的位置：

首页 >

文章列表页 >

Experimental study of nano-composite superhard TiN/Si₃₄ films prepared by ion beam assisted deposition

更新时间：2021-03-12

- Experimental study of nano-composite superhard TiN/Si₃₄ films prepared by ion beam assisted deposition
- NUCLEAR TECHNIQUES Issue 2, (2006)
- 作者机构：
  
  1. 装甲兵工程学院装备再制造技术国防科技重点实验室
  2. 装甲兵工程学院装备再制造技术国防科技重点实验室,北京,100072
- 作者简介：
- 基金信息：
  
  装备再制造技术国防科技重点实验室资金
- DOI：
  CLC： TB383.1
- Published：01 February 2006
- 稿件说明：
移动端阅览
[1]张平,蔡志海,杜月和,谭俊.离子束辅助沉积制备TiN／Si_3N_4纳米超硬膜的工艺研究[J].核技术,2006(02):120-124.

ZHANG Ping CAI Zhihai DUYuehe TAN Jun. Experimental study of nano-composite superhard TiN/Si₃₄ films prepared by ion beam assisted deposition[J]. Nuclear techniques, 2006, (2): 120-124.
[1]张平,蔡志海,杜月和,谭俊.离子束辅助沉积制备TiN／Si_3N_4纳米超硬膜的工艺研究[J].核技术,2006(02):120-124. DOI：

ZHANG Ping CAI Zhihai DUYuehe TAN Jun. Experimental study of nano-composite superhard TiN/Si₃₄ films prepared by ion beam assisted deposition[J]. Nuclear techniques, 2006, (2): 120-124. DOI：

摘要

采用离子束辅助沉积法（Ion beam assisted deposition

IBAD）在单晶硅片上进行沉积制备了TiN／Si3N4 纳米复合超硬薄膜;研究了辅助束流、轰击能量和Ti:Si靶面积比等工艺参数对TiN／Si3N4超硬纳米复合薄膜性能的影响。此外采用纳米硬度计、光电子能谱（X-ray photoelectron spectrum

XPS）和X射线衍射分析（X-ray diffraction

XRD）方法研究了纳米复合薄膜的性能、成分与组织结构;采用原子力显微镜（Atomic force microscopy

AFM）分析了薄膜的表面形貌

并初步探讨了TiN／Si3N4纳米复合超硬薄膜的生长机理。

Abstract

The multiphase nano-commposite coatings consisting of nanocrystalline TiN and amorphous Si3N4 were deposited on silicon substrate by means of ion beam assisted deposition. The influences of current density

ion energy

the area ratio of Ti to Si on microhardness of TiN/Si3N4 films were studied. Both composition and structure of the composite films were analyzed by nanoindenter

XPS and XRD. The surface morphology of the TiN/SiN4 films was observed by AFM. Then the growth mechanism of TiN/Si3N4 films was discussed.

关键词

Keywords

references

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Property of multilayer TiCN films formed by ion-beam-assisted-deposition

Low energy Ar~+ beam assisted deposition of Ag(111) films

Structure and dissolubility of calcium sodium hydroxypolyphosphate film prepared by argon ion beam assisted deposition

Experimental investigation of c-BN films prepared by ion beam assisted deposition

Study of TiCxNy films formed by ion beam assisted depositionon 9Cr18 steel

Related Author

李刘合

徐志潜

JIN Jie XU Zhiqian WANG Jinhui MING Jianchuan GUO Qiqian LI Liuhe

王锦辉

明建川

过骐千

任琮欣

冯涛

Related Institution

北京航空航天大学机械自动化学院

Beijing Research Institute of Automation for Machinery Industry

The Research Center of Semiconductor Functional Film Engineering Technology, Shanghai Institute of Microsystem and Information Technology, the Chinese Academy of Sciences, Shanghai 200050) 2

中国科学院上海应用物理研究所

AI问答

Address：2019 Jialuo Road, Jiading, Shanghai, China Postal code：201800
Tel：021-39194977 Email：LHB@sinap.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 沪ICP备05005479号-1 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.
Total Visits：881139 Visits Today：666

⁰

Experimental study of nano-composite superhard TiN/Si34 films prepared by ion beam assisted deposition

DOI：

摘要

Abstract

关键词

Keywords

references

Experimental study of nano-composite superhard TiN/Si₃₄ films prepared by ion beam assisted deposition