Spectrum diagnosis used in ion source studies

TANG Pingying DAI Jingyi TAN Xiaohua XIANG Wei SHI Lei

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Spectrum diagnosis used in ion source studies

更新时间：2021-03-12

- Spectrum diagnosis used in ion source studies
- NUCLEAR TECHNIQUES Issue 2, (2006)
- 作者机构：
  
  1. 中国工程物理研究院电子工程研究所
  2. 中国工程物理研究院电子工程研究所,绵阳,621900
- 作者简介：
- 基金信息：
  
  国防科技基础研究基金
- DOI：
  CLC： TL503.3
- Published：01 February 2006
- 稿件说明：
移动端阅览
[1]唐平瀛,戴晶怡,谈效华,向伟,石磊.离子源研究中的光谱诊断[J].核技术,2006(02):108-111.

TANG Pingying DAI Jingyi TAN Xiaohua XIANG Wei SHI Lei. Spectrum diagnosis used in ion source studies[J]. Nuclear techniques, 2006, (2): 108-111.
[1]唐平瀛,戴晶怡,谈效华,向伟,石磊.离子源研究中的光谱诊断[J].核技术,2006(02):108-111. DOI：

TANG Pingying DAI Jingyi TAN Xiaohua XIANG Wei SHI Lei. Spectrum diagnosis used in ion source studies[J]. Nuclear techniques, 2006, (2): 108-111. DOI：

摘要

在离子源研究中

光谱分析作为一种重要的实验手段具有不可替代的优越性和便利性。作为一种非接触式的等离子体诊断手段

光谱分析可以在不影响离子源放电工作状态的前提下

对离子源放电等离子体的有关参数迅速作出测量和判断。本文列举了光谱诊断方法在离子源研究中的几种典型应用。

Abstract

Spectrum diagnosis

as an important experimental method

is convenient and irreplaceable in ion source investigation. As a non-contact plasma diagnosis method

it can measure and estimate the plasma parameters of ion source rapidly without disturbing ion source discharge. Several typical applications of spectrum diagnosis used in ion source studies are introduced in this paper.

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Related Institution

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