Investigation of C-N film by cluster beam deposition

CHEN Jingsheng  YU Guoqing  ZHANG Zhibin  PAN Haochang  ZHU Dezhang  XU Hongjie

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Investigation of C-N film by cluster beam deposition

更新时间：2021-03-12

- Investigation of C-N film by cluster beam deposition
- NUCLEAR TECHNIQUES Issue 6, (2001)
- 作者机构：
  
  1. 中国科学院上海原子核研究所核分析技术开放实验室,上海,201800
  2. 中国科学院上海原子核研
- 作者简介：
- 基金信息：
  
  国家自然科学基金! (19735 0 0 4)、(196 75 0 6 2 )
- DOI：
  CLC： O613
- Published：01 June 2001
- 稿件说明：
移动端阅览
[1]陈景升,俞国庆,张志滨,潘浩昌,朱德彰,徐洪杰,郑志豪,阎逢元.团簇沉积C-N薄膜的研究[J].核技术,2001(06):433-438.

CHEN Jingsheng YU Guoqing ZHANG Zhibin PAN Haochang ZHU Dezhang XU Hongjie. Investigation of C-N film by cluster beam deposition[J]. Nuclear techniques, 2001, (6): 433-438.
[1]陈景升,俞国庆,张志滨,潘浩昌,朱德彰,徐洪杰,郑志豪,阎逢元.团簇沉积C-N薄膜的研究[J].核技术,2001(06):433-438. DOI：

CHEN Jingsheng YU Guoqing ZHANG Zhibin PAN Haochang ZHU Dezhang XU Hongjie. Investigation of C-N film by cluster beam deposition[J]. Nuclear techniques, 2001, (6): 433-438. DOI：

摘要

利用荷能团簇沉积装置在高阻硅（ 111）衬底上沉积了碳氮薄膜。通过红外光谱、拉曼谱和X光电子能谱对薄膜的结构和化学组分进行了分析。结果表明

薄膜中存在N -sp3C（ β -C3N4 的键合方式）

但以N -sp2 C和C =C双键的结合方式为主。

Abstract

C-N films were synthesized on high-resistance Si(111) substrates by cluster beam deposition method. Transmission infrared spectroscopy

Raman spectroscopy and X-ray photoelectron spectroscopy were used to characterize the structure of the films. IR

Raman and XPS results indicated that there existed some amount of N-sp 3C bonds

but N-sp 2C and CC bonds were predominant in the films.

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