A study on the properties of surface migration and adhesion during energetic cluster impact deposition

YU Guoqing SHI Ying OUYANG Zhenqian CHEN Jingshen ZHANG Zhibin ZHU Dezhang PAN Haochang XU Hongjie

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A study on the properties of surface migration and adhesion during energetic cluster impact deposition

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- A study on the properties of surface migration and adhesion during energetic cluster impact deposition
- NUCLEAR TECHNIQUES Issue 2, (2001)
- 作者机构：
  
  1. 中国科学院上海原子核研究所核分析开放实验室,上海,201800
  2. 中国科学院上海原子核研究所核分析开放实
- 作者简介：
- 基金信息：
  
  国家自然科学基金!（19675062）;中国科学院基础研究局资助
- DOI：
  CLC： O484
- Published：01 February 2001
- 稿件说明：
移动端阅览
[1]俞国庆,石瑛,欧阳振乾,陈景升,张志滨,朱德彰,潘浩昌,徐洪杰.荷能团簇束成膜的表面迁移和附着特性的研究[J].核技术,2001(02):81-84.

YU Guoqing SHI Ying OUYANG Zhenqian CHEN Jingshen ZHANG Zhibin ZHU Dezhang PAN Haochang XU Hongjie. A study on the properties of surface migration and adhesion during energetic cluster impact deposition[J]. Nuclear techniques, 2001, (2): 81-84.
[1]俞国庆,石瑛,欧阳振乾,陈景升,张志滨,朱德彰,潘浩昌,徐洪杰.荷能团簇束成膜的表面迁移和附着特性的研究[J].核技术,2001(02):81-84. DOI：

YU Guoqing SHI Ying OUYANG Zhenqian CHEN Jingshen ZHANG Zhibin ZHU Dezhang PAN Haochang XU Hongjie. A study on the properties of surface migration and adhesion during energetic cluster impact deposition[J]. Nuclear techniques, 2001, (2): 81-84. DOI：

摘要

研究了不同能量的团簇碰撞有机物（ＣＨ３ＳｉＯ３／２）衬底形成的表面形貌。结果表明，团簇能量的增大，增加了团簇原子在基片表面的有效碰撞能和迁移力，也改善了沉积薄膜的附着性、致密性、平整性等。特别是有机物上修饰条纹的出现，是迁移力增加的有力证据。

Abstract

The surface morphology of organic material (CH3SiO3/2 ) bombarded by energetic cluster beam was investigated by Atomic Force Microscopy (AFM). The results showed that the migration and adhesion of cluster constituent atoms on the surface would be improved if the cluster energy gradually increased

accordingly improving the quality of film. Especially

the existence of convex stripes on the surface indicated the diffusion ability increased with the increasing cluster energy.

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Effects of impact energy on morphology, structure and tribological properties of titanium nitride films deposited by energetic cluster impact

Related Author

CHEN Jingsheng

YU Guoqing

PAN Haochang

ZHU Dezhang

XU Hongjie

郑志豪

阎逢元

Related Institution

Laboratory of Nuclear Analysis Techniques, Shanghai Institute of Nuclear Research, the Chinese Academy of Sciences, Shanghai 201800) ZHENG Zhihao

中国科学院上海原子核研

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