Study of intense pulsed energy effects for high power pulsed ion beam implantation
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Study of intense pulsed energy effects for high power pulsed ion beam implantation
NUCLEAR TECHNIQUESIssue 10, (2000)
作者机构:
1. 北京大学重离子物理研究所,北京,100871
2. 俄罗斯托木斯克科技大学核物理研究所
作者简介:
基金信息:
国家自然科学基金!(项目号19575001)资助
DOI:
CLC:TN305.3
Published:01 October 2000
稿件说明:
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[1]赵渭江,颜莎,乐小云,韩宝玺,薛建明,王宇钢,Remmev G E,Opekounov M S,Isakov I F,Grushin II.强脉冲离子注入中的脉冲能量效应研究[J].核技术,2000(10):689-696.
ZHAO Weijiang YAN Sha LE Xiaoyun HAN Baoxi XUE Jianming WANG Yugang. Study of intense pulsed energy effects for high power pulsed ion beam implantation[J]. Nuclear techniques, 2000, (10): 689-696.
[1]赵渭江,颜莎,乐小云,韩宝玺,薛建明,王宇钢,Remmev G E,Opekounov M S,Isakov I F,Grushin II.强脉冲离子注入中的脉冲能量效应研究[J].核技术,2000(10):689-696.DOI:
ZHAO Weijiang YAN Sha LE Xiaoyun HAN Baoxi XUE Jianming WANG Yugang. Study of intense pulsed energy effects for high power pulsed ion beam implantation[J]. Nuclear techniques, 2000, (10): 689-696.DOI:
Study of intense pulsed energy effects for high power pulsed ion beam implantation
In this paper the intense pulsed energy effects of high power pulsed ion beams (HPIBs) are proved to be very important and useful in ion beam implantation. Three groups of 45# steel samples were implanted with the pulsed ion beams of Cn+ + H+ at the acceleration voltage of 150-260kV for the pulse duration of 50-150ns with the current density of 15-120A/cm2
while a low ion dose of about 1 ×1014cm-2 was kept for all implanted samples. Then their tribological properties as well as microhardness were measured
and their morphology and structure information were given by using SEM and X-ray diffraction analysis. The results showed that the materials’ surface properties and microstyucture have been modified due to the HPIB implantation even at such low level of ion dose
and the modifications strongly depended on the pulsed power density and pulsed energy density of HPIBs. These phenomena were considered as the intense pulsed energy effects and discussed on the basis of one dimensional heat conduction model. Meanwhile
the hardly changed surface microhardness and friction coefficient of 45# steel samples implanted with traditional (C++H+) ions at an ion dose of 1 ×1014cm-2 was given for a demonstration
in which the intense pulsed energy effects are relatively independent of the ion doping effects.