Performance of a grating groove density measuring system by diffraction method

CHEN Qiang HU Zhongwen YU Xiaojiang GAO Jiafa WANG Qiuping

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Performance of a grating groove density measuring system by diffraction method

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- Performance of a grating groove density measuring system by diffraction method
- NUCLEAR TECHNIQUES Issue 1, (2004)
- 作者机构：
  
  1. 中国科学技术大学国家同步辐射实验室
  2. 中国科学技术大学精密机械与精密仪器系,合肥,230029
  3. ,合肥,230027
- 作者简介：
- 基金信息：
- DOI：
  CLC： TL81
- Published：01 January 2004
- 稿件说明：
移动端阅览
[1]陈锵,胡中文,余小江,高家法,王秋平,王琪民.变间距光栅刻线密度测试系统的性能评价[J].核技术,2004(01):9-13.

CHEN Qiang HU Zhongwen YU Xiaojiang GAO Jiafa WANG Qiuping. Performance of a grating groove density measuring system by diffraction method[J]. Nuclear techniques, 2004, (1): 9-13.
[1]陈锵,胡中文,余小江,高家法,王秋平,王琪民.变间距光栅刻线密度测试系统的性能评价[J].核技术,2004(01):9-13. DOI：

CHEN Qiang HU Zhongwen YU Xiaojiang GAO Jiafa WANG Qiuping. Performance of a grating groove density measuring system by diffraction method[J]. Nuclear techniques, 2004, (1): 9-13. DOI：

摘要

在国家同步辐射实验室二期工程光束线的建设中

建立了一套变间距光栅刻线密度的测试系统。该系统采用衍射测量法测量光栅间距的变化

可以对光栅长度为100 mm的平面和凹面光栅的刻线密度进行测量。样品测量结果表明

该系统的测量精度△N/N

2×10

-4

满足光束线工程的要求

可以作为NSRL进口的变间距光栅的验收工具。

Abstract

A grating groove spacing measurement system is established and checked by a sample grating. By detailed error analysis and error sources control

small spacing variation of either plane or concave grating can be determined with accuracy of ΔN/N=2×10

-4

. It is an efficient grating spacing measurement tool for the variable spacing grating as well as the constant spacing grating at NSRL.

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