A new μ?XRF spectrometer

which consists of a monolithic polycapillary X-ray focusing lens and a plane crystal wavelength dispersive spectrometer using a position sensitive proportional counter (PSPC)

is described. The polycapillary X-ray lens is used to collect X rays from a rotating Cu anode X-ray source and to focus them into an X-ray microbeam at its exit focus. By using the position sensitive detector

the wavelength dispersive spectrometer has the capability to simultaneously record a broad range X-ray spectrum without scanning procedure. The experimental results show that the minimum spot size of the X-ray beam focused by the lens is 50 μm for Cu Kα. The detectable energy range of the spectrometer in one run without scanning procedure is more than 800 eV. The energy resolution of the μ?XRF spectrometer is 4.4 eV for Ti Kα.