Study of improvement of cathode vacuum arc stability by second anode action

WANG Guangfu1; 2 ZHANG Huixing2 1

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Study of improvement of cathode vacuum arc stability by second anode action

更新时间：2021-03-12

- Study of improvement of cathode vacuum arc stability by second anode action
- NUCLEAR TECHNIQUES Issue 6, (2004)
- 作者机构：
  
  1. 北京师范大学分析测试中心,北京师范大学低能核物理研究所,北京,100875
  2. 北京师范大学低能核物理研究所北京100875,北京,100875
- 作者简介：
- 基金信息：
  
  国家“863”计划(863-715-008-0040)资助
- DOI：
  CLC： TL657
- Published：01 June 2004
- 稿件说明：
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[1]王广甫,张荟星.第二阳极作用改善阴极真空弧沉积中弧放电稳定性的研究[J].核技术,2004(06):440-443.

WANG Guangfu1, 2 ZHANG Huixing2 1. Study of improvement of cathode vacuum arc stability by second anode action[J]. Nuclear techniques, 2004, (6): 440-443.
[1]王广甫,张荟星.第二阳极作用改善阴极真空弧沉积中弧放电稳定性的研究[J].核技术,2004(06):440-443. DOI：

WANG Guangfu1, 2 ZHANG Huixing2 1. Study of improvement of cathode vacuum arc stability by second anode action[J]. Nuclear techniques, 2004, (6): 440-443. DOI：

摘要

研究了阴极弧等离子体沉积中第二阳极现象改善弧放电稳定性的作用。结果表明:由于弧放电规模增大;等离子体电阻降低;第二阳极现象的存在可大幅度提高造成阴极弧放电不稳定的聚焦磁场阈值。

Abstract

The effect of second anode action on the cathode vacuum arc discharge stability in the cathode arc deposition technology is studied.The results show that the second anode action can increase arc unstable threshold of the focusing magnetic field due to the increase of the arc discharge scale and the decrease of the plasma resistor.

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