By off-set rf-magnetosputtering technique

we have fabricated La2/3Ca1/3MnO3 (LCMO) films on SrTiO3 ( STO )

Yttrium stabilized ZrO2 ( YSZ ) and sapphire ( ALO ) substrates. A metal-insulator transition was observed for samples with the thickness is larger than 200?

the transition temperature

TMI varies with the substrate and the thickness of LCMO. A percolation model was used to fit the temperature dependence of resistance for all films. In combining with the epitaxial process

the interaction between the film and substrates

and the results for sur- face and interface roughness of the films

we argue that the surplus resistance of the films

the active energy of the polaron

and the metal-insulator transition temperature are strongly related to the quality of the films.