Carbon films prepared by ion beam enhanced deposition and their applications for suppression of electron emission

LIU Xianghuai1; 3 ZHU Hong1 REN Congxin1 ZHENG Zhihong1 XU Jingfang2 CHEN Shude3       1

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Carbon films prepared by ion beam enhanced deposition and their applications for suppression of electron emission

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- Carbon films prepared by ion beam enhanced deposition and their applications for suppression of electron emission
- NUCLEAR TECHNIQUES Issue 5, (2004)
- 作者机构：
  
  1. 中国科学院上海微系统与信息技术研究所离子束重点实验室,中国科学院上海微系统与信息技术研究所离子束重点实验室,中国科学院上海微系统与信息技术研究所离子束重点实验室,中国科学院上海微系统与信息技术研究所离子束重点实验室,华东师范大学信息学院电子工程系,华东师范大学理工学院物理系,上海,200050
  2. 华东师范大学信息学院电子工程系上海,200062
  3. 华东师范大学理工学院物理系上海200062,上海200050,上海200050,上海200050,上海200062,上海,200062
- 作者简介：
- 基金信息：
  
  国家重点基础研究发展计划(973 计划) 资助项目(G2000067207-2)
- DOI：
  CLC： TN126
- Published：01 May 2004
- 稿件说明：
移动端阅览
[1]柳襄怀,朱宏,任琮欣,郑志宏,徐静芳,陈树德.离子束增强沉积碳膜及其在抑制电子发射中的应用[J].核技术,2004(05):334-343.

LIU Xianghuai1, 3 ZHU Hong1 REN Congxin1 ZHENG Zhihong1 XU Jingfang2 CHEN Shude3 1. Carbon films prepared by ion beam enhanced deposition and their applications for suppression of electron emission[J]. Nuclear techniques, 2004, (5): 334-343.
[1]柳襄怀,朱宏,任琮欣,郑志宏,徐静芳,陈树德.离子束增强沉积碳膜及其在抑制电子发射中的应用[J].核技术,2004(05):334-343. DOI：

LIU Xianghuai1, 3 ZHU Hong1 REN Congxin1 ZHENG Zhihong1 XU Jingfang2 CHEN Shude3 1. Carbon films prepared by ion beam enhanced deposition and their applications for suppression of electron emission[J]. Nuclear techniques, 2004, (5): 334-343. DOI：

摘要

栅电子发射是影响行波管工作性能和制约其使用寿命的主要因素。国内研制的导弹雷达制导用行波管因存在严重的栅电子发射现象

寿命只有70h

不能付诸军事应用。采用离子束增强沉积的方法在栅网表面沉积一层碳膜后

可有效地抑制栅电子发射

使行波管寿命超过了1000h

在军事和航天领域获得了成功应用。报导了低能离子束增强沉积类金刚石薄膜和高能离子束增强沉积类石墨碳膜的制备技术、结构性能及其在抑制栅电子发射中的应用和机理研究的结果。

Abstract

Electron emission from grid is a serious problem for it limits the service time and destroys the working condition of the traveling wave tubes. After coating carbon films on the surface of the control grid by ion beam en- hanced deposition (IBED) in our laboratory

the electron emission from control grid was suppressed. One of the trav- eling wave tubes with control grid treated with coating carbon film already had a service time more than 1000 h. This technology has already been used in defense and aviation field successfully. The preparation and properties of two kinds of carbon films-diamond like carbon and graphite like carbon

their applications and mechanism for suppression of electron emission are presented in this paper.

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Related Institution

Key Laboratory for Radiation Physics and Technology of Education Ministry of China,Institute of Nuclear Science and Technology, Sichuan University. Chengdu 610064) ZHENG Zhenhua

Microelectronics Branch, Shanghai Institute of Metallurgy, the Chinese Academy of Sciences, Shanghai 200233) 2

中国科学院上海冶金研究所离子束实验室

中国科学院上海冶金研究所微电子学分部中国科学院上海冶金研究所离子束实验室

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