Study on structural and surface properties of FeS<sub>2</sub> thin films prepared by sulfidation

ZHANG Hui WANG Baoyi ZHANG Rengang WAN Dongyun MA Chuangxin ZHOU Chunlan WEI Long

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Study on structural and surface properties of FeS₂ thin films prepared by sulfidation

更新时间：2021-03-12

- Study on structural and surface properties of FeS₂ thin films prepared by sulfidation
- NUCLEAR TECHNIQUES Issue 12, (2004)
- 作者机构：
  
  1. 中国科学院高能物理研究所核分析技术重点实验室
  2. 中国科学院高能物理研究所核分析技术重点实验室,北京,100049
- 作者简介：
- 基金信息：
  
  国家自然科学基金(10275076)
- DOI：
  CLC： O484
- Published：01 December 2004
- 稿件说明：
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[1]张辉,王宝义,张仁刚,万冬云,马创新,周春兰,魏龙.硫化法制备FeS_2薄膜晶体结构和表面特性的研究[J].核技术,2004(12):939-942.

ZHANG Hui WANG Baoyi ZHANG Rengang WAN Dongyun MA Chuangxin ZHOU Chunlan WEI Long. Study on structural and surface properties of FeS₂ thin films prepared by sulfidation[J]. Nuclear techniques, 2004, (12): 939-942.
[1]张辉,王宝义,张仁刚,万冬云,马创新,周春兰,魏龙.硫化法制备FeS_2薄膜晶体结构和表面特性的研究[J].核技术,2004(12):939-942. DOI：

ZHANG Hui WANG Baoyi ZHANG Rengang WAN Dongyun MA Chuangxin ZHOU Chunlan WEI Long. Study on structural and surface properties of FeS₂ thin films prepared by sulfidation[J]. Nuclear techniques, 2004, (12): 939-942. DOI：

摘要

采用磁控溅射方法在Si（100）衬底上淀积纯铁薄膜

在不同温度下（200—400℃）硫化10h得到FeS

薄膜

并对其进行晶体结构和表面成分分析。X射线光电子能谱（XPS）研究表明:低温硫化时易生成硫单质相

随温度的升高

S单质相部分参加反应变为FeS

相

FeS

的S

p峰出现在低能位置

而遗留的单质S的S2p束缚能位置不变。卢瑟福背散射（RBS）测得400℃时薄膜中元素Fe/S接近FeS

的理想化学计量比。

Abstract

Fe layers prepared by magnetron sputtering on Si（100） substrates have been sulfurized thermally to form FeS

thin films at different temperatures （200—400℃） for 10 hours. The structural and surface properties of FeS

have been studied. The results of XPS have shown that sulphur would exist at low temperature. When the iron film is sulfurized at high temperature

sulphur would change into pyrite

but small amount of sulphur would still remain on top of the film. The ratio of iron to sulphur is very close to its stoichiometric proportion according to RBS spectrum at 400℃.

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Related Institution

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南京航空航天大学材料科学与技术学院

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Study on structural and surface properties of FeS2 thin films prepared by sulfidation

DOI：

摘要

Abstract

关键词

Keywords

references

Study on structural and surface properties of FeS₂ thin films prepared by sulfidation