Development of an electron cyclotron resonance ion source and its application

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Development of an electron cyclotron resonance ion source and its application

更新时间：2021-03-12

- Development of an electron cyclotron resonance ion source and its application
- NUCLEAR TECHNIQUES Issue 6, (1999)
- 作者机构：
  
  1. 四川大学原子核科学技术研究所教育部辐射物理及技术开放实验室,成都
  2. ,610064
- 作者简介：
- 基金信息：
  
  国防科工委资助
- DOI：
  CLC： TL629.1
- Published：01 June 1999
- 稿件说明：
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[1]刘仲阳,孙官清,张大忠,陈剑宣.电子回旋共振离子源的研制及应用[J].核技术,1999(06):343-347.

Development of an electron cyclotron resonance ion source and its application[J]. Nuclear techniques, 1999, (6): 343-347.
[1]刘仲阳,孙官清,张大忠,陈剑宣.电子回旋共振离子源的研制及应用[J].核技术,1999(06):343-347. DOI：

Development of an electron cyclotron resonance ion source and its application[J]. Nuclear techniques, 1999, (6): 343-347. DOI：

摘要

描述了一台电子回旋共振离子源的设计、结构及特性。为了获得离子源的长寿命、较高的等离子密度以及高效的传输微波功率，利用合适的三层微波输入窗（石英、Al2O3rap瓷和BN）是很有效的。采用两个带有磁轭的螺线管线圈能够产生满足共振条件（87．5mT）和约束等离子的轴向磁场。利用本源离解CH4—NH3制备成三种C：N膜，经真空退火后，其中两种C：N膜裂解成不同粗细的团簇纤维。

Abstract

The design

construction and characteristics of an electron cyclotron resonance (ECR) ion source are emphatically introduced. An optimized triple layer window (quartz

alumina and BN) was found to be very effective in order to achieving a long lifetime

high--density plasma as well as high quantity introducing microwave. The axial magnetic field to satisfy the ECR condition (87.5mT) and to provide plasma confinement was produced by two solenoid coils with iron yokes. Three C:N films were prepared by decomposing CH4--NH3 in this source. After the films were annealed in vacuum

two of them were rent in C:N cluster fiber with different diameters.

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