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Study of focused ion beam column with microwave ion source
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    • Study of focused ion beam column with microwave ion source

    • NUCLEAR TECHNIQUES   Issue 1, (1999)
    • CLC： TL629.1

    • Published：01 January 1999

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  • Study of focused ion beam column with microwave ion source[J]. Nuclear techniques, 1999, (1): 17-23. DOI：

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