In X-ray fluorescence(XRF) analysis

the use of filter reduces the background interference effectively

and improves the analysis sensitivity.In this paper

the MCNP5 code is used to simulate the filter effects in X-ray tube XRF.The XRF spectra by 140 keV electron beams

with filters of different materials and thicknesses

are compared.Their attenuation rates

i.e.background reduction from the original XRF spectra

are analyzed.