In this paper

effects of helium bubbles in Ti film samples on their RBS spectrum are investigated theoretically and experimentally.While the stopping power of materials

multiple-scattering of the ions

and factors of the experimental setup affect the RBS spectra

the helium bubbles can affect the RBS spectra

too.The size and density of helium bubble can be calculated when the fraction of total volume occupied by helium bubbles and energy spread due to the helium bubbles are obtained by ion beam analysis.ERDA

RBS and positron annihilation spectrometry are used to examine titanium film samples containing different helium concentrations.The experiment results show that the low energy edges of RBS spectra are broadened when the sample is annealed

or the helium concentration is high

and the low energy edges of RBS spectra broadening increases with the annealed temperature and the helium concentration.Using nuclear analysis techniques

one is able to know the behavior of helium bubbles in materials

and the real nature of materials as well.