Studies of the super-smooth mirror roughness by grazing incidence X-ray scattering method

DU Weitao SONG Li WANG Yuzhu LUO Hongxin ZHANG Yifei WANG Jie

doi:null

您当前的位置：

首页 >

文章列表页 >

Studies of the super-smooth mirror roughness by grazing incidence X-ray scattering method

更新时间：2021-03-05

- Studies of the super-smooth mirror roughness by grazing incidence X-ray scattering method
- NUCLEAR TECHNIQUES Vol. 35, Issue 4, (2012)
- 作者机构：
  
  中国科学院上海应用物理研究所
- 作者简介：
- 基金信息：
  
  国家青年科学基金项目(No.11105215)资助
- DOI：
  CLC： O434.1
- Published：01 April 2012
- 稿件说明：
移动端阅览
[1]杜韦陶,宋丽,王玉柱,罗红心,张翼飞,王劼.掠入射X射线散射法研究超光滑镜面粗糙度[J].核技术,2012,35(04):255-259.

DU Weitao SONG Li WANG Yuzhu LUO Hongxin ZHANG Yifei WANG Jie. Studies of the super-smooth mirror roughness by grazing incidence X-ray scattering method[J]. Nuclear techniques, 2012, 35(4): 255-259.
[1]杜韦陶,宋丽,王玉柱,罗红心,张翼飞,王劼.掠入射X射线散射法研究超光滑镜面粗糙度[J].核技术,2012,35(04):255-259. DOI：

DU Weitao SONG Li WANG Yuzhu LUO Hongxin ZHANG Yifei WANG Jie. Studies of the super-smooth mirror roughness by grazing incidence X-ray scattering method[J]. Nuclear techniques, 2012, 35(4): 255-259. DOI：

摘要

在Xiaomin Tong等的理论上发展了一个二维理论模型

建立散射光强分布与超光滑表面功率谱密度（PSD）的关系。在上海同步辐射光源小角散射实验站上

用不同粗糙度的210 mm和320 mm长的超光滑反射镜进行掠入射X射线散射法（GIXRS）实验

测量散射分布并进行处理

计算出两块反射镜的表面均方根粗糙度（RMS）。与白光干涉法测量结果的比对结果表明

根据这种理论进行数据处理得到的RMS值

与白光干涉法的测量结果非常符合。

Abstract

In this work

surface roughness of two large-size super-smooth mirrors

of 210 and 320 mm in length

was studied by grazing incidence X-ray scattering method(GIXRS).A two-dimensional theoretical model was derived based on Tong’s result in 1993

so as to the correlate power spectrum density(PSD) of a mirror surface to the intensity distribution of X-ray scattering.The two mirrors were measured on Beamline 16B at Shanghai Synchrotron Radiation Facility and the data were analyzed.The results showed that the root mean square of the surface roughness calculated using the model agreed well with that measured by a white-light 3D profiler.

关键词

Keywords

references

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Ground-vibration testing and evaluation method based on spectral estimation and its application

A study of polarization state of insert device 3W1 at BSRF

Related Author

WANG Hongjuan

TANG Lin

ZOU Jingui

ZHU Jie CUI Mingqi ZHAO Yidong ZHENG Lei

崔明启

赵屹东

郑雷

Related Institution

School of Geodesy and Geomatics, Wuhan University

Advanced Light Source Research Center, Wuhan University

The Institute for Advanced Studies, Wuhan University

Institute of High energy Physics, the Chinese Academy of Sciences

中国科学院高能物理研究所

AI问答

Address：2019 Jialuo Road, Jiading, Shanghai, China Postal code：201800
Tel：021-39194977 Email：LHB@sinap.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 沪ICP备05005479号-1 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.
Total Visits：881214 Visits Today：741

⁰