SR-XRD and EXAFS study on microstructure of Mn doped ZnO films

ZHANG Bin1 LI Min1 WANG Jianzhong1 SHI Liqun1 CHENG Huansheng1 YANG Tieying2 WEN Wen2 HU Fengchun3 1

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SR-XRD and EXAFS study on microstructure of Mn doped ZnO films

更新时间：2021-03-05

- SR-XRD and EXAFS study on microstructure of Mn doped ZnO films
- NUCLEAR TECHNIQUES Vol. 35, Issue 5, (2012)
- 作者机构：
  
  1. 复旦大学现代物理研究所
  2. 中国科学院上海应用物理研究所
  3. 中国科学技术大学国家同步辐射实验室
- 作者简介：
- 基金信息：
  
  国家自然科学基金(10775033、11075038);上海市重点学科建设项目资助(B107)
- DOI：
  CLC： O484.1
- Published：01 May 2012
- 稿件说明：
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[1]张斌,李敏,王建中,施立群,承焕生,杨铁莹,文闻,胡凤春.SR-XRD和EXAFS研究Mn掺杂ZnO薄膜的微观结构[J].核技术,2012,35(05):321-325.

ZHANG Bin1 LI Min1 WANG Jianzhong1 SHI Liqun1 CHENG Huansheng1 YANG Tieying2 WEN Wen2 HU Fengchun3 1. SR-XRD and EXAFS study on microstructure of Mn doped ZnO films[J]. Nuclear techniques, 2012, 35(5): 321-325.
[1]张斌,李敏,王建中,施立群,承焕生,杨铁莹,文闻,胡凤春.SR-XRD和EXAFS研究Mn掺杂ZnO薄膜的微观结构[J].核技术,2012,35(05):321-325. DOI：

ZHANG Bin1 LI Min1 WANG Jianzhong1 SHI Liqun1 CHENG Huansheng1 YANG Tieying2 WEN Wen2 HU Fengchun3 1. SR-XRD and EXAFS study on microstructure of Mn doped ZnO films[J]. Nuclear techniques, 2012, 35(5): 321-325. DOI：

摘要

用射频磁控溅射技术在蓝宝石衬底上制备了一组不同衬底温度的Mn掺杂ZnO薄膜。质子激发X射线荧光（PIXE）测量表明

薄膜中仅有含量为5 at.%的Mn

未见其它磁性杂质元素（如Fe、Co、Ni等）。同步辐射X射线衍射（SR-XRD）表明

这些Mn掺杂ZnO薄膜具有纤锌矿ZnO结构。SR-XRD和扩展X射线吸收精细结构谱（EXAFS）分析显示

薄膜中未发现Mn团簇或MnO、MnO2、Mn2O3、Mn3O4等二次相

Mn原子是通过替代Zn原子而进入了ZnO晶格。

Abstract

Mn-doped ZnO films were prepared by radio frequency magnetron sputtering on sapphire substrate at different temperatures.They contained Mn of 5 at.%

without any magnetic impurities of Fe

Co and Ni

as were revealed by proton induced X-ray emission(PIXE).Synchrotron radiation X-ray diffraction(SR-XRD) showed that the ZnO:Mn films possessed the wurtzite ZnO structure.No precipitates such as Mn cluster or MnO

MnO2

Mn2O3

and Mn3O4were observed by SR-XRD and fluorescence extended X-ray absorption fine structure spectra(EXAFS) in ZnO:Mn films.EXAFS analysis also showed that Mn atoms were incorporated into ZnO crystal lattice by occupying the sites of zinc atoms.

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