Using image registration method to correct AFM image distortion induced by thermal drift

LONG Fei1 WANG Chummei 1 SUN Jielin 1 HU Jun 1; 2 1

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Using image registration method to correct AFM image distortion induced by thermal drift

更新时间：2021-03-05

- Using image registration method to correct AFM image distortion induced by thermal drift
- NUCLEAR TECHNIQUES Vol. 34, Issue 11, (2011)
- 作者机构：
  
  1. 上海交通大学生命科学技术学院
  2. 中国科学院上海应用物理研究所
- 作者简介：
- 基金信息：
  
  科技部重大科学研究计划(2007CB936000);国家自然科学基金项目(11074168)资助
- DOI：
  CLC： TP391.41
- Published：01 November 2011
- 稿件说明：
移动端阅览
[1]龙飞,王春梅,孙洁林,胡钧.基于图像配准的原子力显微镜图像热漂移失真校正[J].核技术,2011,34(11):877-880.

LONG Fei1 WANG Chummei 1 SUN Jielin 1 HU Jun 1, 2 1. Using image registration method to correct AFM image distortion induced by thermal drift[J]. Nuclear techniques, 2011, 34(11): 877-880.
[1]龙飞,王春梅,孙洁林,胡钧.基于图像配准的原子力显微镜图像热漂移失真校正[J].核技术,2011,34(11):877-880. DOI：

LONG Fei1 WANG Chummei 1 SUN Jielin 1 HU Jun 1, 2 1. Using image registration method to correct AFM image distortion induced by thermal drift[J]. Nuclear techniques, 2011, 34(11): 877-880. DOI：

摘要

在室温大气环境中

原子力显微镜（AFM）的热漂移会影响扫描过程中针尖定位的精度

导致扫描图像的失真

从而增大基于AFM图像的二维测量的误差。针对这种失真

在图像配准方法的基础上提出了热漂移补偿方法

通过建立热漂移的线性模型

校正扫描的AFM图像

从而恢复样品的真实形貌

有效提高了AFM图像二维平面内的测量准确性。

Abstract

Under ambient conditions

thermal drift would limit positioning precision of an AFM tip

resulting in distortion of the scanned image.To remove this kind of imaging error

we developed a thermal drift compensation method based on image registration techniques.The image distortion can be efficiently removed

and the sample topography can be truly restored.

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Related Author

ZHANG Jinjin SHEN Yi LI Lin HU Jun

沈轶

李林

胡钧

LI Lin ZHANG Jinjin HU Jun

张金金

胡钧

CUI Chengyi ZHANG Jinhai ZHOU Xingfei

Related Institution

Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Jiading Campus

Shanghai Institute of Applied Physics, Chinese Academy of Sciences

Department of Physics,Ningbo University

Shanghai Institute of Nuclear Research, the Chinese Academy of Sciences, Shanghai 201800) HAN Gongshe

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