Combined with X-ray reflectivity

interface structures of Ti/Ni/Ti thin films were studied by grazing incidence XAFS method.The films in different thicknesses of Ni layers(1 nm

3 nm and 5 nm) were prepared by DC magnetron sputtering.The GI-XAFS results indicate that the inter-diffusion of Ti/Ni/Ti interface layer increased with the Ni layer thickness

being about 2 nm with the sample of 5-nm thick Ni layer.For the sample of 1-nm Ni layer

the bond lengths of Ni-Ni and Ni-Ti coordination had shrunk because of larger degree of disorder.As thickness of the Ni layer decreases

the degree of disorder gradually increases while the coordinations of Ni-Ti increase and the coordinations of Ni-Ni decrease.