Isotope effects on angular distribution of sputtering atoms

Zhenxia Wang; Fuying Zhu; Wenbiao Chen; Hengshan Zhang; Ahu Zhang

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Isotope effects on angular distribution of sputtering atoms

更新时间：2022-09-13

- Isotope effects on angular distribution of sputtering atoms
- Nuclear Techniques Vol. 09, Issue 2, (1986)
- 作者机构：
  
  1.中国科学院上海原子核研究所
  2.上海半导体器件研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：20 September 1984，
  
  Published：1986-02
- 稿件说明：
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Zhenxia Wang, Fuying Zhu, Wenbiao Chen, et al. Isotope effects on angular distribution of sputtering atoms[J]. Nuclear techniques, 1986, 09(2): 11-12,49,58,59.
DOI：

Zhenxia Wang, Fuying Zhu, Wenbiao Chen, et al. Isotope effects on angular distribution of sputtering atoms[J]. Nuclear techniques, 1986, 09(2): 11-12,49,58,59. DOI：

摘要

本文报道了用50keV Ar

＋

离子在垂直入射情况下对Сu元素进行溅射的实验。研究了作为发射角函数的同位素富集行为。结果表明，较轻的同位素无富集，而较重的同位素在从~5°到80°发射角范围内都是富集的。

Abstract

The isotopes enrichment behavior of copper element as a function of sputtered atoms ejection angle has been studied at 50keV Ar

sputtering ion energy under normal incidence. The present results indicate that the lighter isotope is unenrichment

but the heavier isotope becomes enriched over the ejection angle range from ~5° to~80

关键词

Keywords

references

G. K. Wehner , J. Vac. Sci. Technol. , 41 , 487 ( 1983 ).

R. R. Olson et al . , J. Appl. phys. , 50 , 3677 ( 1979 ).

K. Rödelsperger et al . , Z. Physik , 272 , 127 ( 1975 ).

G. K. Wehner , Appl. phys. Lett. , 30 , 185 ( 1977 ).

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