Altering surface resistivity of polycrystalline Al<sub>2</sub>O<sub>3</sub> by Fe implantation and annealing

Shipu Li; Guomei Wang; Ning Xing; Wei Ren; Xiaoming Chen

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Altering surface resistivity of polycrystalline Al₂O₃ by Fe implantation and annealing

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- Altering surface resistivity of polycrystalline Al₂O₃ by Fe implantation and annealing
- Nuclear Techniques Vol. 13, Issue 12, (1990)
- 作者机构：
  
  武汉工业大学
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：03 July 1989，
  
  Published：01 December 1990
- 稿件说明：
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Shipu Li, Guomei Wang, Ning Xing, et al. Altering surface resistivity of polycrystalline Al₂O₃ by Fe implantation and annealing[J]. Nuclear techniques, 1990, 13(12): 718-723.
DOI：

Shipu Li, Guomei Wang, Ning Xing, et al. Altering surface resistivity of polycrystalline Al₂O₃ by Fe implantation and annealing[J]. Nuclear techniques, 1990, 13(12): 718-723. DOI：

摘要

本文主要阐述铁注入Al

陶瓷退火前后的表面电性能。应用卢瑟福背散射分析（RBS）、俄歇电子能谱分析（AES）和X－光电子能谱分析(XPS)等测试手段，研究了注入层结构、注入射程和纵向浓度分布。最后，扼要地叙述了注入层的导电机制。

Abstract

Surface electrical properties of Fe implanted Al

followed by thermal annealling are presented. The Rutherford backscattering technique

Auger electron spectra and X-ray electron spectra have been used to study the structure of the implanted layer

the implanted ion range and the ion profile. Finally

the conduction mechanism in the implanted layer is discussed briefly.

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references

H. H. Wieder 著，李达汉译，半导体材料电磁参数的测量，计量出版社，北京， 1986 年，第25页。

J. Lindhard et al . , Mat. Fys. Medd. Dan. Vid. Selsk . , 34 （ 1964 ）, 1 .

J. Lindhard et al . , Mat. Fys. Medd. Dan. Vid. Selsk . , 33 （ 1963 ）, 14 .

G. C. Farlow et al . , Nucl. Instr. Meth . , B7/8 （ 1985 ）, 541 .

M. McCargo et al . , Can. J. Phys . , 41 （ 1963 ）, 1231 .

D. Powers et al . , Phys. Reu . , 165 （ 1968 ）, 376 .

Handbook of Auger electron spectroscopy , 2nd ed. , Eden Prairie, MN , 1978 , p. 47 .

V. I. Nefedov et al . , J. Electron Spectroscopy and Related Phenomena , 46 （ 1988 ）, 4 : 381 .

G. W. Simmons et al . , Surf. Sci. , 48 （ 1975 ）, 373 .

J. L. Robert et al . , Surf. Sci , 193 （ 1988 ）, 81 .

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Altering surface resistivity of polycrystalline Al2O3 by Fe implantation and annealing

DOI：

摘要

Abstract

关键词

Keywords

references

Altering surface resistivity of polycrystalline Al₂O₃ by Fe implantation and annealing