Depth-dissection of Si-SiO<sub>2</sub> irradiated with <sup>66</sup>Co by electron spectroscopy

Changshi Liu; Qinzhi Wu; Lingshan Zhang

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Depth-dissection of Si-SiO₂ irradiated with ⁶⁶Co by electron spectroscopy

更新时间：2022-08-16

- Depth-dissection of Si-SiO₂ irradiated with ⁶⁶Co by electron spectroscopy
- Nuclear Techniques Vol. 13, Issue 10, (1990)
- 作者机构：
  
  中国科学院新疆物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：10 August 1989，
  
  Published：01 October 1990
- 稿件说明：
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Changshi Liu, Qinzhi Wu, Lingshan Zhang. Depth-dissection of Si-SiO₂ irradiated with ⁶⁶Co by electron spectroscopy[J]. Nuclear techniques, 1990, 13(10): 589-593.
DOI：

Changshi Liu, Qinzhi Wu, Lingshan Zhang. Depth-dissection of Si-SiO₂ irradiated with ⁶⁶Co by electron spectroscopy[J]. Nuclear techniques, 1990, 13(10): 589-593. DOI：

摘要

应用灵敏的电子能谱分析技术，对经电离辐射辐照的Si-SiO

结构进行深度剖析。实验结果表明：存在于Si-SiO

中的界面区，在电离辐射的作用下向SiO

表面方向展宽，界面中心向SiO

表面方向移动。展宽与偏移的程度与辐照条件紧密相关。文中对实验结果以弱应力键断裂模型进行了分析。

Abstract

The Si-SiO

irradiated with

Co are analyzed by using the depth-dissection techniques of XPS and AES. The results show that there exists an interface and that when the sample is irradiated the interface extends towards the surface of SiO

and the centre of the interface moves towards the surface of SiO

. The extension and movement are dependent on the condition of irradiation. An explanation for the experimental results is given using the Bond Strain Gradient Model.

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Keywords

references

P. S Winokur et al . , IEEE Trans, Nucl. Sci . , NS-34 , （ 1987 ）, 6 :.

D. Briggs , Handbook of X-ray and Ultraviolet photcelectrcn Spectroscopy , Heyden and Son Ltd , 1977 .

D. A. Shirley ed. , Electron Spectroscopy North—Holland Publishing Company , 1972 .

F. J. Grunthaner et al . , Phys. Rev. Lett . , 43 （ 1979 ）, 1683 .

F. J. Grunthaner et al . , IEEE Trans. Nucl. Sci . , NS-29 （ 1982 ), 6 :.

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Depth-dissection of Si-SiO2 irradiated with 66Co by electron spectroscopy

DOI：

摘要

Abstract

关键词

Keywords

references

Depth-dissection of Si-SiO₂ irradiated with ⁶⁶Co by electron spectroscopy