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兰州大学原子核研究所
Received:19 September 1988,
Published:01 July 1990
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Zhihao Zheng, Yongqiang Wang. A simple simulation method for profiling elements[J]. Nuclear techniques, 1990, 13(7): 409-413.
DOI:
Zhihao Zheng, Yongqiang Wang. A simple simulation method for profiling elements[J]. Nuclear techniques, 1990, 13(7): 409-413. DOI:
利用共振核反应进行元素深度分布测量时,从实验产额分布得到浓度分布要经过十分复杂的多重退卷积运算。本文引入“高斯分辨函数”大大简化了运算过程。利用三种离子注入硅中的浓度分布数据,检验了该近似方法的合理性,得到比较满意的结果。
When the depth distribution is measured by using nuclear resonant reaction
it is necessary to carry out complex deconvolutions in order to get concentration distribution from experimental data. In this paper
a "Gaussian resolution function" is put forward to simplify the calculations. The distributions of three elements implanted in silicon are dealt with
and the result is satisfactory.
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