Investigations of target additives for enhancing ion beam intensities from sputter negative ion sources

Guantian Du

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Investigations of target additives for enhancing ion beam intensities from sputter negative ion sources

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- Investigations of target additives for enhancing ion beam intensities from sputter negative ion sources
- Nuclear Techniques Vol. 13, Issue 2, (1990)
- 作者机构：
  
  中国科学院上海原子核研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：17 October 1988，
  
  Published：01 February 1990
- 稿件说明：
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Guantian Du. Investigations of target additives for enhancing ion beam intensities from sputter negative ion sources[J]. Nuclear techniques, 1990, 13(2): 101-105.
DOI：

Guantian Du. Investigations of target additives for enhancing ion beam intensities from sputter negative ion sources[J]. Nuclear techniques, 1990, 13(2): 101-105. DOI：

摘要

用Hiconex 834溅射负离子源研究了Cs

CrO

、CsF和CsI等靶添加剂。一定比例的Cs

CrO

既改善靶表面的铯覆盖又达到喷氧的效果，Fe

、Ag

和Cu

的流强分别提高到纯铁、银和铜靶的10、6和3.5倍。此外，渗少量卤化铯到合适的金属靶内，可方便地制备强的相应卤素负离子束。用慕尼黑大学的高强度负溅射源，渗5% Fe

于铁靶中，使Fe

流强提高了一倍。

Abstract

CrO

CsI and CsF as target additives in Hiconex 834 source have been investigated. It is shown that adding Cs

CrO

in suitable ratios can improve Cs coverage and obtain the effect of simultaneous spraying of O

. The intensities of Fe

and Cu

ion beams are greater than those obtained with pure Fe

Ag and Cu targets

by 10

6 and 3.5 times

respectively. Negative beams of halogens can be obtained conveniently by mixing corresponding Cs halides with metal to form sputter targets. In the Munich high current source

a Fe target with an admixture of 5% Fe

produces about twice the Fe

beam current as compared to that from a pure Fe target.

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Keywords

references

R. middleton , Nucl, Instr. Meth. , 144 （ 1977 ）, 373 .

G. Braun-Elwert et al . , Nucl. Instr. Meth. , 146 （ 1977 ）, 121 .

R. middleton , IEEE Trans. Nucl. Sci. , 23 （ 1976 ）, 1093 .

Ionex Model 834 negative ion sputter souace, Instruction manual .

K. Brand , Nucl. Instr. Meth. , 154 （ 1978 ）, 595 .

A. Urban et al . , Hedges and Hall Proceeding Workshop on technique in AMS , Oxford , 1986 , p. 108 .

R. mideleton , Nucl. Instr. Meth. , 214 （ 1983 ）, 139 .

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