A study of implanted He in stainless steel by means of proton elastic scattering

Yupu Li; Peixuan Wang; Jiarui Liu; Peiran Zhu; Feng Yang; Guoguang Zhang; Ruzhang Ma

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A study of implanted He in stainless steel by means of proton elastic scattering

更新时间：2022-08-16

- A study of implanted He in stainless steel by means of proton elastic scattering
- Nuclear Techniques Vol. 12, Issue 11, (1989)
- 作者机构：
  
  北京钢铁学院
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：05 December 1987，
  
  Published：1989-11
- 稿件说明：
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Yupu Li, Peixuan Wang, Jiarui Liu, et al. A study of implanted He in stainless steel by means of proton elastic scattering[J]. Nuclear techniques, 1989, 12(11): 653-656.
DOI：

Yupu Li, Peixuan Wang, Jiarui Liu, et al. A study of implanted He in stainless steel by means of proton elastic scattering[J]. Nuclear techniques, 1989, 12(11): 653-656. DOI：

摘要

用质子弹性散射法研究了316L不锈钢中注入的氦。在77—673K温区，30—170keV能区完成了不同剂量（10

—3×10

/cm

）的He注入。当靶温≤

时，He能被不锈钢有效地捕获且最大浓度随剂量的增加而线性增加。在给定的剂量下，当靶温较高时，被捕获的He的数量

随温度增加而减少，这意味着在较高的温度下注He，同时有He的再发射发生。比较不同靶温下注He得到的He分布可以看出：注入时He的捕获和迁移强烈依赖于靶温。

Abstract

Implanted He in SS316L has been studied by means of proton elastic scattering. He ions were implanted with energies of 30—170 keV and doses of 10

—3×10

/cm

at temperatures of 77—673 K. At RT and below that

it is found that He is efficiently trapped and the maximum concentration

increases linearly with the dose. At higher temperature Q

the total amount of trapped He decreases with increasing temperature for a given dose. This implies that He re-emission has to be taken into account at higher temperature. A comparison of He depth profiles for various target temperatures suggests that the He trapping and mobility during implantation are dependent on the temperature.

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references

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杨福家和赵国庆主编，离子束分析，复旦大学出版社， 1985 年，第54页。

郭华聪，核技术， 10 （ 1987 ）， 2 ： 59 。

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J. F. Ziegler , The stopping and range of ions in solids , Pergamon Press Inc. , New York , 1985 .

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S. T. Picraux , Ann, Rev. Mater. Sci. , 14 （ 1984 ）, 335 .

W. Moller , Nucl. Instr. Mech. , 209—210 （ 1983 ）, 773 .

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