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Application of the 820 ion source on the 600 kV ion implanter
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    • Application of the 820 ion source on the 600 kV ion implanter

    • Nuclear Techniques   Vol. 12, Issue 4, (1989)

    • Received：05 October 1987，

      Published：1989-04

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  • Anmin Guan, Yilin Sun, Haiyang Geng, et al. Application of the 820 ion source on the 600 kV ion implanter[J]. Nuclear techniques, 1989, 12(4): 229-232. DOI：

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