The angular distributions of sputtered atoms for Fe-W alloy with 27 keV Ar<sup>+</sup> ion bombardment

Zhenxia Wang; Liping Zheng; Zhenlan Tao; Jisheng Pan

您当前的位置：

首页 >

文章列表页 >

The angular distributions of sputtered atoms for Fe-W alloy with 27 keV Ar⁺ ion bombardment

更新时间：2022-08-16

- The angular distributions of sputtered atoms for Fe-W alloy with 27 keV Ar⁺ ion bombardment
- Nuclear Techniques Vol. 12, Issue 2, (1989)
- 作者机构：
  
  中国科学院上海原子核研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：14 January 1988，
  
  Published：1989-02
- 稿件说明：
移动端阅览
Zhenxia Wang, Liping Zheng, Zhenlan Tao, et al. The angular distributions of sputtered atoms for Fe-W alloy with 27 keV Ar⁺ ion bombardment[J]. Nuclear techniques, 1989, 12(2): 79-84.
DOI：

Zhenxia Wang, Liping Zheng, Zhenlan Tao, et al. The angular distributions of sputtered atoms for Fe-W alloy with 27 keV Ar⁺ ion bombardment[J]. Nuclear techniques, 1989, 12(2): 79-84. DOI：

摘要

本文报道在27keV Ar

离子轰击Fe-W（30wt.%）合金情况下，溅射Fe和W原子的角分布实验结果。用卢瑟福背散射（RBS）谱仪分析了不同发射角

处溅射沉积在衬底上的Fe-W薄膜的成分。结果表明，角分布形状均为over-cosine型，且W原子对Fe原子的比值与发射角

有关。与我们以前关于Cu-Au合金和Ti-Ni合金的结果比较，暗示择优溅射程度可能与合金成分的质量比值有关。简单的模型分析发现，靶表面形貌是引起溅射原子角分布变化的重要因素。

Abstract

Angular distributions of sputtered Fe and W atoms from Fe-W alloy (25 wt%) under 27 keV Ar ion bombardment have been measured by Rutherford backscattering and a collector

on which the sputtered atoms with different ejection angle

from the alloy surface deposit. The results indicate that angular distributions of both Fe atoms and W atoms are over-cosine shape and that the sputtered composition ratio N

is linked with the ejection angle

θ.

Comparing this work with our previous work on Cu-Au and Ti-Ni alloy systems implies that the mechanism of the preferential sputtering teems to associate with the mass ratio of components. A simple model has been used and it is found that the target surface topography may be an important factor to cause the variation of angular distribution of sputtered atoms.

关键词

Keywords

references

R. R, Olson et al . , J . Appl . phys . , 50 （ 1979 ）, 3677 .

王震遐等，核技术， 10 （ 1987 ）, 9 : 5 。

王震遐等，中国科学院上海原子核研究所年报， 6 （ 1986 ）， 35 。

F. R. Vozzo and G. W. Reynolds , Nucl, Instr. Meth . , 209/210 （ 1983 ）, 555 .

R. G. Allas et al . , Nucl. Instr . Meth . , 194 （ 1982 ）, 615 .

J. P. O'conner et al . , Nucl. Instr. Meth . , B13 （ 1986 ）, 365 .

M. Szymonski et al . , Nucl. Instr. Meth . , B14 （ 1986 ）, 263 .

P. Sigmund , Nucl. Instr. Meth . , 194 （ 1982 ）, 541 .

T. Okutani et al . , J . Appl. phys . , 51 （ 1980 ）, 2884 .

M. Saidoh et al . , Nucl , Instr. Meth . , B13 （ 1986 ）, 403 .

W. O. Hofer et al J. Nucl. Mater . , 76/77 （ 1978 ）, 156 .

B. Emmoth et al . , J. Nucl. Mater . , 76/77 （ 1978 ）, 129 .

P. R. Malmberg et al . , Nucl, Instr. Meth . , B2 （ 1984 ）, 679 .

H. H. Andersen et al . , Nucl. Instr. Meth . , B6 （ 1985 ）, 459 .

H. H. Andersen et al . , Nucl. Instr. Meth . , 209/210 （ 1983 ）, 487 .

H. J. Kang et al . , Surf. Sci . , 127 （ 1983 ）, L179 .

王震遐等，核技术， 10 （ 1987 ）， 1 : 4 。

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Investigation of ion sputtering for eutectic Cu-37at%Ag alloys

Position calibration of silicon strip detector using quasi-elastic scattering of ¹⁶O+¹⁹⁷Au

Calculation of optical model potential for n+²³²Th reaction

Analysis of angular and radial distributions of gamma’s energy deposition in scintillation optical fiber based on GEANT3 system

Angular distribution of neutrons caused by 75MeV/u 16O ionsin radiobiological experiment area

Related Author

张慧明

赵烈

朱福英

陶振兰

章骥平

潘冀生

王震遐

胡海龙

Related Institution

中国科学院腐蚀科学开放研究实验室中国科学院上海原子核研究所杭州大学

杭州大学

中国科学院上海原子核研究所

Corrosion Science Laboratory,Academia Sinica

Institute of High Energy Physics, Chinese Academy of Sciences

AI问答

Address：2019 Jialuo Road, Jiading, Shanghai, China Postal code：201800
Tel：021-39194977 Email：LHB@sinap.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 沪ICP备05005479号-1 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.
Total Visits：880647 Visits Today：174

⁰

The angular distributions of sputtered atoms for Fe-W alloy with 27 keV Ar+ ion bombardment

DOI：

摘要

Abstract

关键词

Keywords

references

The angular distributions of sputtered atoms for Fe-W alloy with 27 keV Ar⁺ ion bombardment