The experimental sputtering angular distribution of Cu-Au alloy with 27 keV oblique incident Ar<sup>+</sup> ion beam

Zhenxia Wang; Zhenlan Tao; Liping Zheng; Dexin Cao; Zhiyi Zou; Zuyao Zhou; Wei Zhou

您当前的位置：

首页 >

文章列表页 >

The experimental sputtering angular distribution of Cu-Au alloy with 27 keV oblique incident Ar⁺ ion beam

更新时间：2022-08-16

- The experimental sputtering angular distribution of Cu-Au alloy with 27 keV oblique incident Ar⁺ ion beam
- Nuclear Techniques Vol. 11, Issue 4, (1988)
- 作者机构：
  
  1.中国科学院上海原子核研究所
  2.中国科学院上海冶金研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：20 April 1987，
  
  Published：1988-04
- 稿件说明：
移动端阅览
Zhenxia Wang, Zhenlan Tao, Liping Zheng, et al. The experimental sputtering angular distribution of Cu-Au alloy with 27 keV oblique incident Ar⁺ ion beam[J]. Nuclear techniques, 1988, 11(4): 13-16.
DOI：

Zhenxia Wang, Zhenlan Tao, Liping Zheng, et al. The experimental sputtering angular distribution of Cu-Au alloy with 27 keV oblique incident Ar⁺ ion beam[J]. Nuclear techniques, 1988, 11(4): 13-16. DOI：

摘要

用27keV Ar

分别在垂直和倾斜入射情况下，轰击了Cu-Au（30wt%）合金样品，测量了Cu和Au原子的溅射角分布。角分布是用卢瑟福背散射（RBS）技术分析Al捕获膜上的Cu-Au沉积成分而定量得到的。结果表明：（1）在Ar

倾斜（

＝40°）入射时，Cu原子择优发射，且程度比垂直入射（

＝0°）时增强；（2）倾斜入射时，Cu原子的角分布显示出在接近于样品表面法线方向的发射角范围内（

45°），发射机率比垂直入射时减小。

Abstract

The angular distributions of sputtered Cu and Au atoms have been measured under normal and oblique incidence bombardment with 27 keV Ar

for Cu-Au (30 wt%) alloy. Sputtering material on Al collector has been analysed by RBS technique.

The results indicate that copper atoms are ejected preferentially under oblique incidence bombardment (

=40°) and the preferential ratio for oblique incidence is higher than that for normal incidence (

=0°). From the angular distributions of sputtered copper atoms the ejection probability in the ejected angle region between 0° and 45° for oblique incidence is found to be lower than that for normal incidence.

关键词

Keywords

references

G. K. Wehner et al . , J. Appl. Phys. , 50 ( 1979 ), 3677 .

H. H. Andersen et al . , Surf. Sci. , 123 ( 1983 ), 39 .

Hee Jae Kang et al . , Surf. Sci. , 127 ( 1983 ), L179 .

王震遐等，核技术， 10 （ 1987 ）， 1 ： 4 。

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Isotope effects on angular distribution of sputtering atoms

Position calibration of silicon strip detector using quasi-elastic scattering of ¹⁶O+¹⁹⁷Au

Calculation of optical model potential for n+²³²Th reaction

Analysis of angular and radial distributions of gamma’s energy deposition in scintillation optical fiber based on GEANT3 system

Angular distribution of neutrons caused by 75MeV/u 16O ionsin radiobiological experiment area

Related Author

Ahu Zhang

Hengshan Zhang

Wenbiao Chen

Fuying Zhu

胡海龙

Signorini C

Romoli M

Commara La M

Related Institution

Shanghai Institute of Semiconductor Device

Institute of High Energy Physics, Chinese Academy of Sciences

意大利那不勒斯国家核物理研究所

Istituto Nazionale di Fisica Nucleare-Sezione di Napoli

Dipartimento di Scienze Fisiche, Università di Napoli

AI问答

Address：2019 Jialuo Road, Jiading, Shanghai, China Postal code：201800
Tel：021-39194977 Email：LHB@sinap.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 沪ICP备05005479号-1 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.
Total Visits：880647 Visits Today：174

⁰

The experimental sputtering angular distribution of Cu-Au alloy with 27 keV oblique incident Ar+ ion beam

DOI：

摘要

Abstract

关键词

Keywords

references

The experimental sputtering angular distribution of Cu-Au alloy with 27 keV oblique incident Ar⁺ ion beam