The investigation of ion beam mixing and phase transformation in Ni/Si system

Sining Mao; Xihong Yang; Jian Chen; Jiarui Liu; Feng Yang; Yu Wang

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The investigation of ion beam mixing and phase transformation in Ni/Si system

更新时间：2022-08-16

- The investigation of ion beam mixing and phase transformation in Ni/Si system
- Nuclear Techniques Vol. 11, Issue 3, (1988)
- 作者机构：
  
  1.北京大学
  2.中国科学院物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1988-03
- 稿件说明：
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Sining Mao, Xihong Yang, Jian Chen, et al. The investigation of ion beam mixing and phase transformation in Ni/Si system[J]. Nuclear techniques, 1988, 11(3): 52-55,64.
DOI：

Sining Mao, Xihong Yang, Jian Chen, et al. The investigation of ion beam mixing and phase transformation in Ni/Si system[J]. Nuclear techniques, 1988, 11(3): 52-55,64. DOI：

摘要

注入参量变化引起不同的混合结果，在宽温区中得到Ni

Si、NiSi、NiSi

多种化合物相，进而探讨了Xe离子诱导的Ni/Si体系界面原子混合机理及诱发相变的动力学过程。

Abstract

The nickel silicide phases produced by ion beam mixing were investigated. Ni

NiSi and NiSi

phases were obtained with different implantation parameters. The dynamic process of phase transformation and the mechanism of ion beam mixing were also discussed.

关键词

Keywords

references

W. K. Chu et al . , Backscattering spectrometry , Academic Press , New York , 1978 , p. 139 .

L. S. Wielunski et al . , Phys. Stat. Sol., (a) 72 ( 1982 ), 399 .

J. M. Poate et al . , Thin films interdiffusion and reactions , Wiley , New York , 1978 , Chap. 10 .

M. Hansen , Constitution of binary alloys , McGraw-Hill , New York , 1958 , p. 1040 .

B. Y. Tsaur et al . , Appl. Phys. Lett. , 35 ( 1979 ), 225 .

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